| Code | 4175001 | |
| Model | VMU3020 | |

I. Usage
II. Features

Hardware Configuration



| Manual zoom lens 0.7X-4.5X | Linear guide way | Supporting multiple external accessories |


| Code | 4175001 | |
| Model | VMU3020 | |
| Table | Glass Table Dimension(mm) | 350*250 |
| XY Stroke (mm) | 300*200 | |
| Load Capacity | approx. 20 kg | |
| Weight (kg) | 330kg | |
| Dimension (L*W*H, unit:mm) | 620*840*1020 | |
|
Measuring Targeting System (Standard Accessories) |
Camera: TEO™ Color 1 / 2 "CCD Camera | |
| Zoom Lens: Pomeas™ AUTO zoom lens | ||
| Magnification of lens: 0.7-4.5X | ||
| Video Magnification: 20-128X FOV:11.1-1.7mm | ||
| Resolution: 0.5 μm | ||
| Metrology Software | RationalVue™ | |
| Z-axis Stroke | 200mm | |
| Accuracy E1* | Ex, y ≤ (2.0+L/200) μm | |
| Accuracy E2* | Exy ≤ (2.3+L/200) μm | |
| Illumination | Transmission light, surface light adopt LED, brightness adjustable | |
| Power | 110/220V(AC),800W | |







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